With this paper, The brand new lapping slurry and sharpening slurry are introduced. And also the deliquescence degree of CLBO is fallen to lowest. A new working technologies is also adopted. Right after rough polishing, the concentration of ultra-precision sharpening slurry is increased correctly. So does the ultra-precision sprucing velocity, and the wiping velocity is quicker when compared to the deliquescence pace. The CLBO crystal area roughness can achieve 1nm and hold the surface area high quality well. Obtain by way of your institution
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We summarized The present enhancement standing from the higher-power DUV laser both equally at the wavelength of FHG on the one-μm laser and at 193 nm. The current development on the good-condition/fiber laser, plus the nonlinear optical crystals, prompts don't just the typical energy but will also the beam top quality (coherence) of the DUV lasers to an unprecedented amount.
全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。
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Both equally the 1040 nm and 1078 nm laser originate from one dual-wavelength Yb-doped fiber laser. Each laser is amplified by stages of fiber amplifier and Yb-doped resources amplifier, respectively.
On the opposite side, the power scaling in the NIR laser is an additional factor to improve the regular electric power of your 193-nm DUV laser. Due to the not enough the superior-electric power amplification Remedy of your NIR laser (one example is at 1553 nm), nonlinear frequency procedures which include optical parameter oscillation (OPO) may very well be applied to create a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength and acquiring relative higher electric power [21]. Not too long ago, a diamond Raman laser confirmed its ability in accomplishing a superior electrical power and a large conversion performance in the 1st Stokes on the one-μm laser [22,23], which implies the likelihood to be utilized from the 193-nm DUV laser generation as a consequence of its superior Raman gain and large frequency change.
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The conversion effectiveness from fundamental NIR to DUV is from five% to 36% according to the claimed brings about Table one. Escalating the conversion effectiveness will lessen the load on the look and set up of the fundamental laser amplifier and also the electrical ability consumption. A fantastic beam quality of the basic laser can even add towards the rising of your conversion efficiency in addition to the suitable electricity intensity in the NIR and inexperienced laser from the SHG and FHG system, respectively. The best conversion efficiencies from NIR to environmentally friendly and environmentally friendly to DUV laser by usage of CLBO crystal are 70% and about 50%, respectively [12], which check here corresponds to the conversion performance of 35% from elementary to DUV.
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